How To Repair Vacuum System Gate Valve

Loftier Vacuum Gate Valves

Loftier Vacuum Gate Valves provide isolation for loftier vacuum pumps such equally turbo pumps, ion-pumps, or cryo-pumps. Gate Valves are provided in manual and pneumatic designs, and for clean and low outgassing loftier vacuum applications. Flanges can be either NW, ISO or CF(ConFlat). Gate Valves with 3-position actuation are bachelor for pressure command process steps.

Ultra-Loftier Vacuum Gate Valves

Ultra-High Vacuum (UHV) Gate Valves provide depression outgassing isolation for applications needing ultra-high vacuum or vacuum bake-out. CF Flanged Gate Valves employ a pocketknife border seal with a copper gasket bonnet seal. Both manual and pneumatic designs are bachelor. Bake-out temperatures can exist as high equally 200°C with the valve open, and 150°C with the valve closed.

Correct Angle Valves

Right Angle, or Poppet, Vacuum Valves provide isolation of vacuum systems. In add-on, Right Bending Valves provide isolation of roughing pumps from the vacuum system. Flanges for these valves can be Tube End, NW, ISO or CF. Correct Angle Valves are available in either manual or pneumatic applications. Valves can be provided with or without solenoids.

No Flanges

NW Valves

ISO Valves

CF Valves

11000 Series
Stainless Steel
Gate Valve

21200 Series
Stainless Steel
Viton Seal
Million Cycle
Gate Valve

The One thousand thousand Cycle Gate Valves Serial are vacuum valves designed for loftier vacuum applications when pressure ranges approximate 1 x x-9 mbar and bake-out temperatures exercise not exceed 150°C. In that location are no mechanical locks inside the vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate generation and providing smoother actuation. These valves provide valving for Cryopumps, Turbo Pumps, Ion Pumps, and other applications requiring clean, high cycle, low outgassing valves.

11000 Serial
Stainless Steel
Viton Seal
three-Position

The 3-Position Gate Valves are designed for apply in etching, CVD, and whatsoever other procedure that requires pressure control. When used in conjunction with upstream mass menstruum controllers, this series valve has exceptional pressure control adequacy. The valves utilise two pneumatic solenoids and an air force per unit area regulator to achieve 3 positions: fully-open, fully-closed, and an adjustable third position. The get-go solenoid controls the fully-open up, fully-airtight positions while a 2nd solenoid controls the third position.